https://nova.newcastle.edu.au/vital/access/ /manager/Index en-au 5 Design and control of a single-chip SOI-MEMS atomic force microscope https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:30198 Wed 11 Apr 2018 14:54:56 AEST ]]> A low-loss MEMS tunable capacitor with movable dielectric https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:8688 Wed 11 Apr 2018 11:21:51 AEST ]]> Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:19038 Sat 24 Mar 2018 08:05:16 AEDT ]]> Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:19039 Sat 24 Mar 2018 08:05:15 AEDT ]]> A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:23241 Sat 24 Mar 2018 07:10:38 AEDT ]]>